Improved vertical-scanning interferometry
نویسندگان
چکیده
منابع مشابه
Improved vertical-scanning interferometry.
We describe a method that combines phase-shifting and coherence-peak-sensing techniques to permit measurements with the height resolution of phase-shifting interferometry without the interval-slope limitation of lambda/4 per data sample of phase-shifting interferometry. A five-frame algorithm is used to determine both the best-focus frame position and the fractional phase from the best-focus fr...
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A novel method to double the measurement range of wavelength scanning interferometery (WSI) is described. In WSI the measured optical path difference (OPD) is affected by a sign ambiguity, that is, from an interference signal it is not possible to distinguish whether the OPD is positive or negative. The sign ambiguity can be resolved by measuring an interference signal in quadrature. A method t...
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Wediscuss the height and lateral resolution that can be achieved in vertical scanningwhite-light interferometry (SWLI).With respect to interferometric height resolution, phase-shifting interferometry (PSI) is assumed to provide the highest accuracy. However, if the noise dependence of SWLI phase evaluation and PSI algorithms is considered, SWLImeasurements can be shown to bemore precise.With re...
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ژورنال
عنوان ژورنال: Applied Optics
سال: 2000
ISSN: 0003-6935,1539-4522
DOI: 10.1364/ao.39.002107